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May 19, 2021Dados técnicos. Princípio de medição: espectrômetro infravermelho não dispersivo de comprimento de onda duplo (NDIR) Sensibilidade: 1 ppmv 3,43g / ano, 1,81 × 10-5 atm cc / seg (ou mbar L / s) Outros gases e umidade não afetarão a sensibilidadeGet price

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SF6 is applied in the above process as an etching gas. Due to the density and large molecule size, SF6 is a preferred etching gas in flat panel and MEMS production processes. Fluorinated gases, such as Sulfur Hexafluoride (SF6), play very important roles in the manufacturing of silicon devices.Get price

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Sulfur Hexafluoride (SF6) is an inorganic, colorless, odorless, non-flammable, extremely potent greenhouse gas, and an excellent electrical insulator. SF6 has an octahedral geometry, consisting of six fluorine atoms attached to a central sulfur atom. It is a hypervalent molecule.Get price

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